I designed/worked on pretty much everything but photolith. Mostly plasma stuff. Etchers, sputtering, vapor deposition, LPCVD, ect. I also spent time in the design and fabrication of ion implantation and molecular beam epitaxy equipment. Based on all that it should be obvious I'm also pretty knowledgable about high vacuum gear.
Implanters were the greatest challenge from a control standpoint, not only because of the process and robotics involved but also because of safety. As you're probably aware an ion implanter can be a lethal machine. Not that a sputterer or a plasma etcher can't, just that an implanter can kill in multiple ways. Funny how such a "clean" business is full of so much nasty stuff eh?
I enjoyed my stint in the industry. It was different from my prior industrial experience in that I went from dealing with entire plants to stand alone machines, all of which do what they do on an atomic level. Forced me to brush up on my physics so it wasn't a total loss